Design , fabrication , and open - loop control of micro deformable mirrors for astronomical telescopes
نویسنده
چکیده
The research product ...............................................................................................................................1 Deformable mirrors: current state-of-the-art...........................................................................................2 AO and MEMS DMs: relevance to astronomy and space science..........................................................3 Summary of MEMS DM research and plans ..........................................................................................4 Design and modeling ..........................................................................................................................4 Optical MEMS process innovation.....................................................................................................5 Precise control approaches for MEMS DMs ......................................................................................6 Productive sectors involved in MEMS DMs and applications of the research.......................................7 Astronomical imaging applications ....................................................................................................8 Retinal imaging and bio-microscopy applications..............................................................................9 Defense applications ...........................................................................................................................9 References .............................................................................................................................................10
منابع مشابه
MEMS Deformable Mirrors for Astronomical Adaptive Optics
We report on the development of high actuator count, micro-electromechanical (MEMS) deformable mirrors designed for high order wavefront correction in ground and space-based astronomical adaptive optics instruments. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that has been used extensively to correct for ocular aberrations in retinal imagi...
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An approach is presented for evaluating the performance achieved by a closed-loop adaptive-optics system that is employed with an astronomical telescope. This method applies to systems incorporating one or several guide stars, a wave-front reconstruction algorithm that is equivalent to a matrix multiply, and one or several deformable mirrors that are optically conjugate to different ranges. Sys...
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The design, manufacture, and testing of optical quality surface micromachined deformable mirrors (DMs) is described. With such mirrors, the shape of the reflective surface can be modified dynamically to compensate for optical aberrations and thereby improve image resolution in telescopes or microscopes. Over several years, we have developed microelectromechanical system (MEMS) processing techno...
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